1.0MicroDevice Prototyping Facilityhttps://sciences.ucf.edu/physics/mpfCollege of Scienceshttps://sciences.ucf.edu/physics/mpf/author/coswebadmin/rich600338<blockquote class="wp-embedded-content" data-secret="7Httww4KvW"><a href="https://sciences.ucf.edu/physics/mpf/our-past-projects/">Our Past Projects</a></blockquote><iframe sandbox="allow-scripts" security="restricted" src="https://sciences.ucf.edu/physics/mpf/our-past-projects/embed/#?secret=7Httww4KvW" width="600" height="338" title="“Our Past Projects” — MicroDevice Prototyping Facility" data-secret="7Httww4KvW" frameborder="0" marginwidth="0" marginheight="0" scrolling="no" class="wp-embedded-content"></iframe><script> /*! This file is auto-generated */ !function(d,l){"use strict";l.querySelector&&d.addEventListener&&"undefined"!=typeof URL&&(d.wp=d.wp||{},d.wp.receiveEmbedMessage||(d.wp.receiveEmbedMessage=function(e){var t=e.data;if((t||t.secret||t.message||t.value)&&!/[^a-zA-Z0-9]/.test(t.secret)){for(var s,r,n,a=l.querySelectorAll('iframe[data-secret="'+t.secret+'"]'),o=l.querySelectorAll('blockquote[data-secret="'+t.secret+'"]'),c=new RegExp("^https?:$","i"),i=0;i<o.length;i++)o[i].style.display="none";for(i=0;i<a.length;i++)s=a[i],e.source===s.contentWindow&&(s.removeAttribute("style"),"height"===t.message?(1e3<(r=parseInt(t.value,10))?r=1e3:~~r<200&&(r=200),s.height=r):"link"===t.message&&(r=new URL(s.getAttribute("src")),n=new URL(t.value),c.test(n.protocol))&&n.host===r.host&&l.activeElement===s&&(d.top.location.href=t.value))}},d.addEventListener("message",d.wp.receiveEmbedMessage,!1),l.addEventListener("DOMContentLoaded",function(){for(var e,t,s=l.querySelectorAll("iframe.wp-embedded-content"),r=0;r<s.length;r++)(t=(e=s[r]).getAttribute("data-secret"))||(t=Math.random().toString(36).substring(2,12),e.src+="#?secret="+t,e.setAttribute("data-secret",t)),e.contentWindow.postMessage({message:"ready",secret:t},"*")},!1)))}(window,document); //# sourceURL=https://sciences.ucf.edu/physics/mpf/wp-includes/js/wp-embed.min.js </script> Ultraviolet-Assisted Release of Microelectromechanical Systems From Polyimide Sacrificial Layer Javaneh Boroumand Azad, Imen Rezadad, Robert E. Peale, Justin W. Cleary, and Kurt Eyink Process heating of microelectromechanical systems (MEMSs) devices hardens polyimide sacrificial layers, complicating the final release and lowering yield for delicate structures. This paper reports ultraviolet (UV)-assisted release, which is demonstrated on an ... Read morehttp://sciences.ucf.edu/physics/mpf/wp-content/uploads/sites/48/2023/11/PastProThumb_JMEMS2015.png