{"id":130,"date":"2023-11-09T11:31:00","date_gmt":"2023-11-09T16:31:00","guid":{"rendered":"https:\/\/sciences.ucf.edu\/physics\/mpf\/?page_id=130"},"modified":"2023-11-09T11:31:02","modified_gmt":"2023-11-09T16:31:02","slug":"materials-growth","status":"publish","type":"page","link":"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/","title":{"rendered":"Materials Growth"},"content":{"rendered":"\n<h2 class=\"wp-block-heading has-text-align-center\">Plasma Enchaned Chemical Vapor Deposition<\/h2>\n\n\n\n<div class=\"wp-block-media-text alignwide is-stacked-on-mobile is-vertically-aligned-top\" style=\"grid-template-columns:36% auto\"><figure class=\"wp-block-media-text__media\"><img decoding=\"async\" width=\"352\" height=\"504\" data-src=\"http:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png\" alt=\"Trion Orion II PECVD\" class=\"wp-image-120 size-full lazyload\" data-srcset=\"https:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png 352w, https:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc-210x300.png 210w\" data-sizes=\"(max-width: 352px) 100vw, 352px\" src=\"data:image\/svg+xml;base64,PHN2ZyB3aWR0aD0iMSIgaGVpZ2h0PSIxIiB4bWxucz0iaHR0cDovL3d3dy53My5vcmcvMjAwMC9zdmciPjwvc3ZnPg==\" style=\"--smush-placeholder-width: 352px; --smush-placeholder-aspect-ratio: 352\/504;\" \/><\/figure><div class=\"wp-block-media-text__content\">\n<p>Trion Orion II PECVD<br><a href=\"https:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/SOP_TrionPECVD.pdf\">Standard Operating Procedure<\/a><\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Description:<\/h3>\n\n\n\n<p>N\/A<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Features:<\/h3>\n\n\n\n<p>Oxide Deposition w\/ TEOS He bubbler unit<br>Dual Frequency RF: 600W @13.56MHz &amp; 100kHz<br>Substrate Temperature controlled: RT-500\u00b0C<br>Base Pressure: 60 mTorr<br>Supported gasses: CF4, O2, He (TEOS), N2<\/p>\n<\/div><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Plasma Enchaned Chemical Vapor Deposition Trion Orion II PECVDStandard Operating Procedure Description: N\/A Features: Oxide Deposition w\/ TEOS He bubbler unitDual Frequency RF: 600W @13.56MHz &amp; 100kHzSubstrate Temperature controlled: RT-500\u00b0CBase Pressure: 60 mTorrSupported gasses: CF4, O2, He (TEOS), N2<\/p>\n","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_eb_attr":"","footnotes":"","_links_to":"","_links_to_target":""},"class_list":["post-130","page","type-page","status-publish"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.2 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Materials Growth - MicroDevice Prototyping Facility<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Materials Growth - MicroDevice Prototyping Facility\" \/>\n<meta property=\"og:description\" content=\"Plasma Enchaned Chemical Vapor Deposition Trion Orion II PECVDStandard Operating Procedure Description: N\/A Features: Oxide Deposition w\/ TEOS He bubbler unitDual Frequency RF: 600W @13.56MHz &amp; 100kHzSubstrate Temperature controlled: RT-500\u00b0CBase Pressure: 60 mTorrSupported gasses: CF4, O2, He (TEOS), N2\" \/>\n<meta property=\"og:url\" content=\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/\" \/>\n<meta property=\"og:site_name\" content=\"MicroDevice Prototyping Facility\" \/>\n<meta property=\"article:modified_time\" content=\"2023-11-09T16:31:02+00:00\" \/>\n<meta property=\"og:image\" content=\"http:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/\",\"url\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/\",\"name\":\"Materials Growth - MicroDevice Prototyping Facility\",\"isPartOf\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/#primaryimage\"},\"thumbnailUrl\":\"http:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png\",\"datePublished\":\"2023-11-09T16:31:00+00:00\",\"dateModified\":\"2023-11-09T16:31:02+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/#primaryimage\",\"url\":\"http:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png\",\"contentUrl\":\"http:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/trion_pecvd_cc.png\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Materials Growth\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#website\",\"url\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/\",\"name\":\"MicroDevice Prototyping Facility\",\"description\":\"\",\"publisher\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"},{\"@type\":\"Organization\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#organization\",\"name\":\"MicroDevice Prototyping Facility\",\"url\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#\/schema\/logo\/image\/\",\"url\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/MPF-Logo.png\",\"contentUrl\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/wp-content\/uploads\/sites\/48\/2023\/11\/MPF-Logo.png\",\"width\":220,\"height\":120,\"caption\":\"MicroDevice Prototyping Facility\"},\"image\":{\"@id\":\"https:\/\/sciences.ucf.edu\/physics\/mpf\/#\/schema\/logo\/image\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Materials Growth - MicroDevice Prototyping Facility","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/sciences.ucf.edu\/physics\/mpf\/materials-growth\/","og_locale":"en_US","og_type":"article","og_title":"Materials Growth - MicroDevice Prototyping Facility","og_description":"Plasma Enchaned Chemical Vapor Deposition Trion Orion II PECVDStandard Operating Procedure Description: N\/A Features: Oxide Deposition w\/ TEOS He bubbler unitDual Frequency RF: 600W @13.56MHz &amp; 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