{"id":185,"date":"2023-11-16T12:10:18","date_gmt":"2023-11-16T17:10:18","guid":{"rendered":"https:\/\/sciences.ucf.edu\/physics\/mpf\/?page_id=185"},"modified":"2023-11-16T12:11:04","modified_gmt":"2023-11-16T17:11:04","slug":"class-syllabus","status":"publish","type":"page","link":"https:\/\/sciences.ucf.edu\/physics\/mpf\/class-syllabus\/","title":{"rendered":"Class Syllabus"},"content":{"rendered":"\n

Syllabus
Special Topic ST:PHY5937 Device Prototyping
HPA1 0363, Credits: 3 (0,3) TuTh 9-11 a.m. PSB 440
Prof: Robert E. Peale, PSB 423, Robert.Peale@ucf.edu
Office hours: MW 3:30-4:30<\/p>\n\n\n\n

Prerequisites:\u00a0<\/strong>Graduate standing or consent of instructor.<\/p>\n\n\n\n

Course Description: <\/strong>Fabrication and characterization of micro-scale devices, including micro-electrical-mechanical systems, sensors, optical devices, and micro-fluidic devices.<\/p>\n\n\n\n

Goals and objectives: <\/strong>Learn the techniques of fabricating and characterization micro-scale devices in a hands-on clean-room environment. Topics include photo- and electron-beam lithography, electron-beam evaporation, sputtering, metal lift-off, reactive ion etching, inductively coupled plasma etching, barrel ashing, wet etching, plasma-enhanced chemical vapor deposition, sacrificial layers, optical microscopy, profilometry, microprobe-station, 4-point probe resistivity measurement, scanning electron microscopy, UV-visible spectroscopy, atomic force microscopy. A goal is that students who pass this course can be given key-card access to the facilities to begin their dissertation research.<\/p>\n\n\n\n

Required text: <\/strong>S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, Volume 1-Process Technology, (Lattice Press, Sunset Beach, CA 1986).<\/p>\n\n\n\n

Course calendar:<\/strong>
First month<\/span>:\u00a0Environmental Health and Safety training, Photolithograpy, descum, metal deposition, and lift-off. Optical microscopy.<\/p>\n\n\n\n

Second month<\/span>:\u00a0PECVD oxide growth, wet etching. Profilometry. 4 point resisitivity measurement.<\/p>\n\n\n\n

Third month<\/span>:\u00a0RIE-ICP etching, barrel-ashing, scanning electron microscosopy, Electron-beam lithography, UV-vis spectroscopy, atomic force microscopy.<\/p>\n\n\n\n

Fourth month<\/span>:\u00a0Make and characterize final project device: Deep fluid channels, optical planer waveguides, air-bridges, cantilevers,<\/p>\n\n\n\n

Course assignments (assignments and exams):<\/strong> This is a hands on laboratory with all class time spent in the physics Microdevice Prototyping Facility (MPF). There will be assigned reading, one midterm and a final based on the assigned reading and standard operation procedures for the instruments in MPF, and a final fabrication project.<\/p>\n\n\n\n

Methods of evaluation: <\/strong>Participation will count for 25%, midterm 25%, final project 25%, final exam 25%. The final course grade will be available on myucf.<\/p>\n\n\n\n

PHYSICS DEPT MISSED WORK POLICY: <\/strong>Making up missed work is permitted only for UCF-sanctioned activities and bona fide medical or family reasons. Authentic justifying documentation must be provided in every case (in advance for UCF-sanctioned activities).<\/strong> The form of the make-up will be determined by the instructor.<\/em><\/p>\n\n\n\n

First month:<\/h2>\n\n\n\n
    \n
  1. Environmental Health and Safety training (Basic. Online and in-lab practical).<\/li>\n\n\n\n
  2. Cleanroom etiquette.<\/li>\n\n\n\n
  3. Traveler sheets.<\/li>\n\n\n\n
  4. Photolithograpy (Spinner, hot plate, mask aligner, grating masks, squares).<\/li>\n\n\n\n
  5. Descum (Samco and Barrel Asher)<\/li>\n\n\n\n
  6. Metal deposition (Electron-beam evaporators, Cressington, MRC, thermal evaporation)<\/li>\n\n\n\n
  7. Lift-off. (Chemical hood)<\/li>\n\n\n\n
  8. Optical microscopy (Record images, Lateral dimensions).<\/li>\n\n\n\n
  9. Profilometry (Measure metal thicknesses).<\/li>\n\n\n\n
  10. Deliverable: Report results.<\/li>\n<\/ol>\n\n\n\n

    Second month:<\/h2>\n\n\n\n
      \n
    1. PECVD oxide growth on metal squares.<\/li>\n\n\n\n
    2. Resist mask on squares.<\/li>\n\n\n\n
    3. Wet etch oxide in BOE to Si substrate.<\/li>\n\n\n\n
    4. Dry etch oxide (Barrel asher, trion) to substrate).<\/li>\n\n\n\n
    5. Strip resist<\/li>\n\n\n\n
    6. Undercut etch into Si on Barrel asher.<\/li>\n\n\n\n
    7. Dry etch to remove oxide mask.<\/li>\n\n\n\n
    8. Deliverable: Report results.<\/li>\n\n\n\n
    9. Mid term<\/li>\n<\/ol>\n\n\n\n

      Third month:<\/h2>\n\n\n\n
        \n
      1. scanning electron microscosopy,<\/li>\n\n\n\n
      2. Electron-beam lithography,<\/li>\n\n\n\n
      3. 4 point probe.<\/li>\n\n\n\n
      4. UV-vis spectroscopy,<\/li>\n\n\n\n
      5. Atomic force microscopy.<\/li>\n<\/ol>\n\n\n\n

        Fourth month:<\/h2>\n\n\n\n
          \n
        1. Deep fluid channels,<\/li>\n\n\n\n
        2. optical planer waveguides<\/li>\n\n\n\n
        3. Final Project<\/li>\n\n\n\n
        4. Final Exam<\/li>\n<\/ol>\n\n\n\n
          \n
          Syllabus Download<\/a><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

          SyllabusSpecial Topic ST:PHY5937 Device PrototypingHPA1 0363, Credits: 3 (0,3) TuTh 9-11 a.m. PSB 440Prof: Robert E. Peale, PSB 423, Robert.Peale@ucf.eduOffice hours: MW 3:30-4:30 Prerequisites:\u00a0Graduate standing or consent of instructor. Course Description: Fabrication and characterization of micro-scale devices, including micro-electrical-mechanical systems, sensors, optical devices, and micro-fluidic devices. Goals and objectives: Learn the techniques of fabricating and characterization micro-scale … Read more<\/a><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_eb_attr":"","footnotes":"","_links_to":"","_links_to_target":""},"class_list":["post-185","page","type-page","status-publish"],"yoast_head":"\nClass Syllabus - MicroDevice Prototyping Facility<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/sciences.ucf.edu\/physics\/mpf\/class-syllabus\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Class Syllabus - MicroDevice Prototyping Facility\" \/>\n<meta property=\"og:description\" content=\"SyllabusSpecial Topic ST:PHY5937 Device PrototypingHPA1 0363, Credits: 3 (0,3) TuTh 9-11 a.m. PSB 440Prof: Robert E. Peale, PSB 423, Robert.Peale@ucf.eduOffice hours: MW 3:30-4:30 Prerequisites:\u00a0Graduate standing or consent of instructor. Course Description: Fabrication and characterization of micro-scale devices, including micro-electrical-mechanical systems, sensors, optical devices, and micro-fluidic devices. Goals and objectives: Learn the techniques of fabricating and characterization micro-scale ... 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