Contact a Superuser

General

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Cleanroom Procedure——
HF Hood——

Photolithography

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Spin Coater——
Hot Plate——
Mask Aligner——

Metal Deposition and Lift-Off

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Electron Beam Evaporator——
Dirty Ebeam Evaporator——
Dirty Thermal Evaporator——
MRC Sputter——
Cressington Sputter——
Sonicator——

Materials Growth

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Trion PECVD——

Dry Etching

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Branson Barrel Asher——
SAMCO RIE Etcher——
Trion RIE-ICP Etcher——
STS Deep RIE——

Device Processing Tools

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Critical Point Dryer——
Rapid Thermal Annealer——
Tube Furnaces——
Oven——
Wafer Scriber——

Characterization

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Hanscom AFM——
Walters SPM AFM——
Optical Microscope——
Profilometer——
Probe Station——
Hall Effect——
JEOL SEM——
Hitachi SEM——
Cary Spectrophoto——
Balances——