Plasma Enchaned Chemical Vapor Deposition
Trion Orion II PECVD
Standard Operating Procedure
Description:
N/A
Features:
Oxide Deposition w/ TEOS He bubbler unit
Dual Frequency RF: 600W @13.56MHz & 100kHz
Substrate Temperature controlled: RT-500°C
Base Pressure: 60 mTorr
Supported gasses: CF4, O2, He (TEOS), N2