Critical Point Dryer
SPI-DRY™
Standard Operating Procedure
Description:
Low Temperature Isotropic Etcher
Features:
13.56 MHz RF Generator 500 W max
Quartz process chamber 10″ dia. x 20″ deep
Supported Gasses: CF4 & O2
Base Pressure: 60 mTorr
Rapid Thermal Annealer
VWR(R) Standard
Description:
N/A
Features:
Max temperature: 1200 °C
Manual and Auto2, H2
Tube Furnace
Lindeburg Tube Furnace
Description:
N/A
Features:
Maximum Temperature: 1200 °C
3 Zone Tube Furnace
Lindeburg 3″ 3 Zone Tube Furnace
Description:
N/A
Features:
3 ft x 3″ diameter tube
3 heating zones
Maxumum Temperature: 1500 °C
Wafer Scriber
Karl Suss Wafer Scriber
Description:
N/A
Features:
N/A