Barrel Asher
![Barrel Asher](http://sciences.ucf.edu/physics/mpf/wp-content/uploads/sites/48/2023/11/barrelasher_cc.png)
Branson/IPC
Standard Operating Procedure
Description:
Low Temperature Isotropic Etcher
Features:
13.56 MHz RF Generator 500 W max
Quartz process chamber 10″ dia. x 20″ deep
Supported Gasses: CF4 & O2
Base Pressure: 60 mTorr
Reactive Ion Etcher
![Samco RIE-1C](http://sciences.ucf.edu/physics/mpf/wp-content/uploads/sites/48/2023/11/samco_cc.png)
Samco RIE-1C
Standard Operating Procedure
Description:
N/A
Features:
Operating Requency: 13.56 MHz
Maximum Power: 200 Watts
Supported gases: CF4, Ar, O2, H2
Reactive Ion Etcher with Inductively Coupled Plasma
![](http://sciences.ucf.edu/physics/mpf/wp-content/uploads/sites/48/2023/11/trion_rie_icp_cc.png)
Trion MiniLock II RIE-ICP
Standard Operating Procedure
Description:
For parallel mask alignment and UV photoresist removal.
Features:
He substrate cooling
Supported gasses: O2,CF4,Ar, H2,CH4
Water cooled RF
600 W
13.56 MHz
Labview interface
Load Lock
Deep Reactive Ion Etching
![STS Machine](http://sciences.ucf.edu/physics/mpf/wp-content/uploads/sites/48/2023/11/STS_cc.png)
STS
Description:
N/A
Features:
Inductively Coupled Plasma Processes
Unit with load lock
Bosch Process
Supported gasses: SF6, C4F8, Ar, O2, CF4